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Filtering by: Keyword Electron-beam lithography Resource type Dissertation Subject Physics

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Controlling Optical Properties of Thin Film Materials with Electron-Beam Lithography

Description:

From the early usage of metallic thin films as mirrors tracing back to 2900 BC, to the modern thin film photonic circuits as a mature optical processing platform, and to the growing class of atomically-thin two-dimensional (2D) materials with diverse and tailorable properties, thin film materials have played an important...

Keyword:

Two-dimensional materials, Photonic circuits, Thin film materials, Topological photonics, Electron-beam lithography, and Optical materials

Subject:

Physics and Materials Science

Creator:

Liu, Pufan

Owner:

Scholarly Digital Publishing

Language:

en

Date Uploaded:

02/16/2023

Date Created:

2022-01-01

Resource Type:

Dissertation

Alternate Identifier:

etdadmin_upload_946295 and http://dissertations.umi.com/northwestern:16358