The advancement of nanotechnology is at least partially dependent on the ability to synthesize and arrange complex nanostructures on a substrate. Nanolithography, or the patterning of materials at the sub-micrometer length-scale, has been traditionally performed using a number of methods such as conventional photolithography, ion-beam etching, and electron-beam lithography. While...
This thesis centers around the development and application of novel high throughput lithography tools. These advances help: 1) establish the field of nanocombinatorics, where massive libraries (termed megalibraries) of materials can be prepared in a positionally encoded manner and then screened for functional activity, and 2) advance stereolithographic 3D printing...