Patterning of BaTiO3 Nanostructures Using Modified Micromolding in CapillariesPublic Deposited
There is a continuing need for patterning multifunctional materials to harness their features and explore synergy among diverse properties and phenomena. Soft lithography, among various patterning techniques, is a versatile method that can generate inorganic patterns in a parallel mode. Experimentation was performed making use of flexible soft lithography to fabricate miniature patterns of a complex multifunctional oxide, BaTiO3. Specifically, a modified method of micromolding in capillaries (MIMIC) was used with solbased starting materials. Modifications of MIMIC consisted of an O2 plasma treatment to the surface of the mold and substrate and the use of a thin-film mold. Nanoscale features (~ 50nm) were produced with this modified method and examined using atomic force microscopy (AFM) and scanning electron microscopy (SEM). The patterns were found to be highly dense, uniform, and continuous over a relatively large area. These modifications to the traditional MIMIC technique were significant; the resulting method proved to be simple and effective in producing the desired patterns.